| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12819
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-1284
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31678
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12944
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12979
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12896
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12903
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12861
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12736
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12951 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2014-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77a01770819b3294fe9bed3593ec41d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd44b67f240f06f9d58ad3f8698d56ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5659d9806033337cff9d2714c2145bb3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1cdeb09bc83ab5a97101edce964a7ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d55714044f7b0262075887c04d4f1d16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f00736942a933a71beed65a9903d7d94 |
| publicationDate |
2014-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-104112635-A |
| titleOfInvention |
Cold spray barrier coated component of a plasma processing chamber and method of manufacture thereof |
| abstract |
The invention refers to a cold spray barrier coated component of a plasma processing chamber and a method of manufacture thereof. Concretely, the cold spray barrier coated component of a semiconductor plasma processing chamber comprises a substrate having at least one metal surface wherein a portion of the metal surface is configured to form an electrical contact. A cold spray barrier coating is formed from a thermally and electrically conductive material on at least the metal surface configured to form the electrical contact of the substrate. Further, the cold spray barrier coating may also be located on a plasma exposed and/or process gas exposed surface of the component. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112447475-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111996590-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112447475-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111996590-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113939894-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I771770-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109314033-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109314033-B |
| priorityDate |
2013-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |