Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0176 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0235 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-096 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-019 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00269 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00579 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 |
filingDate |
2012-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2015-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aded908bed10ea9a78bad10b556a6a94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0f2d36cc104a214196d2710aebfc438 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a52e3be0f5f2f04eaa7ae6f8daaaebf |
publicationDate |
2015-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
CN-102815659-B |
titleOfInvention |
Semiconductor devices with moving members and methods for making the same |
abstract |
The present disclosure provides an embodiment of a micro-electro-mechanical system (MEMS) structure, the MEMS structure comprising a MEMS substrate; a first and second conductive plugs of a semiconductor material disposed on the MEMS substrate, wherein the first conductive plug is configured for electrical interconnection and the second conductive plug is configured as an anti-stiction bump; a MEMS device configured on the MEMS substrate and electrically coupled with the first conductive plug; and a cap substrate bonded to the MEMS substrate such that the MEMS device is enclosed therebetween. |
priorityDate |
2011-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |