http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102741987-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31055 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 |
| filingDate | 2011-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102741987-B |
| titleOfInvention | Dry ecthing agent and use its dry-etching method |
| abstract | The feature of dry ecthing agent of the present invention is, it comprises by chemical formula CFn 3 wherein, X represents H, F, Cl, Br, I, CH to C ≡ CX(n 3 , CFHn 2 or CFn 2 h.) represent fluoridize propine and following in any one: (B) is selected from by On 2 , On 3 , CO, COn 2 , COCln 2 and COFn 2 at least one gas in the group of composition, (C) is selected from by Fn 2 , NFn 3 , Cln 2 , Brn 2 , In 2 and YFn n (in formula, Y represents Cl, Br or I.N represents integer, 1≤n≤5.) at least one gas in the group that forms, and (D) is selected from by CFn 4 , CHFn 3 , Cn 2 fn 6 , Cn 2 fn 5 h, Cn 2 fn 4 hn 2 , Cn 3 fn 8 , Cn 3 fn 4 hn 2 , Cn 3 clFn 3 h and Cn 4 fn 8 at least one gas in the group of composition, described dry ecthing agent plays the burden of environment this effect little, and process window is wide, also can tackle and requires the processing of high-aspect-ratio and excite operation etc. without the need to special substrate. |
| priorityDate | 2010-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 51.