| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45578 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45519
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45551
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2009-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dce28f2014254dc7f54f3515a0b69c20 |
| publicationDate |
2010-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-101665921-A |
| titleOfInvention |
Film deposition apparatus, substrate processing apparatus and film deposition method |
| abstract |
A film deposition apparatus to form a thin film by supplying first and second reaction gases within a vacuum chamber includes a turntable, a protection top plate, first and second reaction gas supplyparts extending from a circumferential edge towards a rotation center of the turntable, and a separation gas supply part provided therebetween. First and second spaces respectively include the first and second reaction gas supply parts and have heights H1 and H2. A third space includes the separation gas supply part and has a height H3 lower than H1 and H2. The film deposition apparatus further includes a vacuum chamber protection part which surrounds the turntable and the first, second and third spaces together with the protection top plate to protect the vacuum chamber from corrosion. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I627305-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I677590-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105742211-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102453888-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105088190-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10508340-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105742211-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105051860-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103526184-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103526184-B |
| priorityDate |
2008-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |