| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8d4914041481b14c69ec0c4b48e9e372 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-172
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-427
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-389
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0732
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0038 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K101-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-48 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-073 |
| filingDate |
2000-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4b9676d3199007eb55a35bea6482570
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd7d96504815e208a73d12927f2e43de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b5412aeb1816daeaff86ec97d8f48cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_861057faa7a1cbe2a08fcdd609933590
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e14967dbad44d52e702d46c4bda5cd0b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1043cb9006e6f22b23fced8b93343264 |
| publicationDate |
2005-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CA-2373565-C |
| titleOfInvention |
Beam shaping and projection imaging with solid state uv gaussian beam to form vias |
| abstract |
A diode-pumped, solid-state laser (52) of a laser system (50) provides ultraviolet Gaussian output (54) that is converted by a diffractive optical element (90) into shaped output (94) having a uniform irradiance profile. A high percentage of the shaped output (94) is focused through an aperture of a mask (98) to provide imaged shaped output (118). The laser system (50) facilitates a method for increasing the throughput of a via drilling process over that available with an analogous clipped Gaussian laser system. This method is particularly advantageous for drilling blind vias (20b) that have better edge, bottom, and taper qualities than those produced by a clipped Gaussian laser system. An alternative laser system (150) employs a pair of beam diverting galvanometer mirrors (152, 154) that directs the Gaussian output around a shaped imaging system (70) that includes a diffractive optical element (90) and a mask (98). Laser system (150) provides a user with the option of using either a Gaussian output or an imaged shaped output (118). |
| priorityDate |
1999-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |