http://rdf.ncbi.nlm.nih.gov/pubchem/reference/8241618
Outgoing Links
Predicate
Object
contentType
Journal Article
issn
2072-666X
issueIdentifier
1
pageRange
37-
publicationName
Micromachines
startingPage
37
hasFundingAgency
http://rdf.ncbi.nlm.nih.gov/pubchem/organization/MD5_37598a0bda828a95e97d0db174e7433b
bibliographicCitation
Deng K, Yang F, Wang Y, Lai C, Han K. Design and Fabrication of a Ka Band RF MEMS Switch with High Capacitance Ratio and Low Actuation Voltage. Micromachines (Basel). 2021 Dec 28;13(1). PMID: 35056203; PMCID: PMC8781898.
creator
http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_423b4e06855d2414e708beb5f4cae2d9
http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_4a755210679672dd409ba2cf41855e26
http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_55c4a85059463064b57e2d86c7c96474
http://rdf.ncbi.nlm.nih.gov/pubchem/author/ORCID_0000-0002-7308-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_554053cfcf288438a7babdb1970bca40
date
2021-12-28-04:00
^^<
http://www.w3.org/2001/XMLSchema#date
>
identifier
https://pubmed.ncbi.nlm.nih.gov/PMC8781898
https://pubmed.ncbi.nlm.nih.gov/35056203
https://doi.org/10.3390/mi13010037
isPartOf
https://portal.issn.org/resource/ISSN/2072-666X
http://rdf.ncbi.nlm.nih.gov/pubchem/journal/43033
language
English
source
https://pubmed.ncbi.nlm.nih.gov/
https://www.crossref.org/
title
Design and Fabrication of a Ka Band RF MEMS Switch with High Capacitance Ratio and Low Actuation Voltage
Total number of triples:
23
.