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bibliographicCitation Klepper KB, Nilsen O, Fjellvåg H. Deposition of thin films of organic-inorganic hybrid materials based on aromatic carboxylic acids by atomic layer deposition. Dalton Trans. 2010 Dec 28;39(48):11628–35. doi: 10.1039/c0dt00817f. PMID: 21038067.
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title Deposition of thin films of organic–inorganic hybrid materials based on aromatic carboxylic acids by atomic layer deposition
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