http://rdf.ncbi.nlm.nih.gov/pubchem/reference/22943197

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contentType Journal Article
endingPage 22252
issn 1094-4087
issueIdentifier 19
pageRange 22237-22252
publicationName Optics Express
startingPage 22237
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bibliographicCitation Chen X, Ren Z, Shimizu Y, Chen YL, Gao W. Optimal polarization modulation for orthogonal two-axis Lloyd's mirror interference lithography. Opt Express. 2017 Sep 18;25(19):22237–52. doi: 10.1364/oe.25.022237. PMID: 29041538.
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date 2017-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
identifier https://doi.org/10.1364/oe.25.022237
https://pubmed.ncbi.nlm.nih.gov/29041538
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language English
source https://www.crossref.org/
https://pubmed.ncbi.nlm.nih.gov/
title Optimal polarization modulation for orthogonal two-axis Lloyd’s mirror interference lithography

Total number of triples: 25.