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Object |
| contentType |
English Abstract|Journal Article|Research Support, Non-U.S. Gov't |
| endingPage |
5 |
| issn |
1000-0593 |
| issueIdentifier |
6 |
| pageRange |
833-5 |
| publicationName |
Guang pu xue yu guang pu fen xi = Guang pu |
| startingPage |
833 |
| bibliographicCitation |
Liu F, Ren B, Tian Z. [Surface Ramam spectropscopy for in situ investigating silicon etching process]. Guang Pu Xue Yu Guang Pu Fen Xi. 2000 Dec;20(6):833–5. PMID: 12938485. |
| creator |
http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_0b02c304031e1eae30b9774e438d5409
http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_7c805be6f1d5e4a999238f225a05ca0e
http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_83003a06ecddcb00b42750df93639170 |
| date |
200012 |
| identifier |
https://pubmed.ncbi.nlm.nih.gov/12938485 |
| isPartOf |
https://portal.issn.org/resource/ISSN/1000-0593
http://rdf.ncbi.nlm.nih.gov/pubchem/journal/22036 |
| language |
Chinese |
| source |
https://pubmed.ncbi.nlm.nih.gov/ |
| title |
[Surface Ramam spectropscopy for in situ investigating silicon etching process] |
| discusses |
http://id.nlm.nih.gov/mesh/M0019854
http://id.nlm.nih.gov/mesh/M0026714 |
| hasPrimarySubjectTerm |
http://id.nlm.nih.gov/mesh/D013059Q000379
http://id.nlm.nih.gov/mesh/D012825Q000737
http://id.nlm.nih.gov/mesh/D017655Q000737 |
| hasSubjectTerm |
http://id.nlm.nih.gov/mesh/D010084
http://id.nlm.nih.gov/mesh/D004563
http://id.nlm.nih.gov/mesh/D013499 |
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http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24524 |