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Lin MF, Wu JL, Chang KL, Lee WJ, Chang CP, Lin YC, Chen PH. Recycle of synthetic calcium fluoride and waste sulfuric acid to produce electronic grade hydrofluoric acid. Environ Sci Pollut Res Int. 2021 Aug;28(30):40633–9. doi: 10.1007/s11356-020-09867-x. PMID: 32729035. |