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bibliographicCitation Pothiraja R, Milanov A, Parala H, Winter M, Fischer RA, Devi A. Monomeric malonate precursors for the MOCVD of HfO2 and ZrO2 thin films. Dalton Trans. 2009 Jan 28;(4):654–63. doi: 10.1039/b810528f. PMID: 19378558.
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title Monomeric malonate precursors for the MOCVD of HfO2and ZrO2thin films
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