| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b3a00902baf7157c2c4f7a90ec48b907
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7a372c2da21cef2086c74e2f4db621a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4cfe045040927e8d16dd3d5516210c59 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-622 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-622
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-64 |
| filingDate |
1999-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2271debf8056f5a9bf841af874517523
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea842d3837b717c23474693ef15183a4 |
| publicationDate |
1999-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-9953379-A1 |
| titleOfInvention |
Method for producing small and micro-sized ceramic parts |
| abstract |
The invention relates to a method for producing small and micro-sized ceramic parts by means of lithography. The aim of the invention is to design a method in such a way that ceramic structures with high thermal and mechanical stability can be produced. This is achieved by applying a pre-ceramic polymer containing silicon to a high-temperature resistant substrate, followed by drying at room temperature, pictorial exposure of the substrate coated with the pre-ceramic polymer to electromagnetic radiation (wavelength < 4000 nm), development of the exposed film in an organic solvent, pyrolysis at a temperature of above 900 DEG C and subsequent sintering of the developed plastic film to form a dimensionally stable three-dimensional moulded body at a temperature of above 1600 DEG . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7323133-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102863217-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102008036923-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102008036923-B4 |
| priorityDate |
1998-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |