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filingDate 1998-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6aeaf66bc440a83c733a79e1ed916ea5
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publicationDate 1999-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-9951796-A1
titleOfInvention Method for removing photoresist and plasma etch residues
abstract A method for the removing of plasma etch residues on a substrate comprising the steps of: (i) contacting the substrate with a cleaning composition, and (ii) contacting the substrate with ozonated water. The preferred cleaning composition has a pH from 2 to 6 and comprises: (A) water; (B) at least one selected hydroxylammonium compound; and (C) at least one basic compound; and optionally (D) a chelating stabilizer; and optionally (E) a surfactant.
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priorityDate 1998-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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