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filingDate 1998-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1999-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-9936159-A1
titleOfInvention Process and system for separation and recovery of perfluorocompound gases
abstract Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; providing at least one size selective membrane having a feed side and a permeate side; contacting the feed side of the at least one membrane with the gas mixture; withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.
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