Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_10d4f702456b9a93b93c9755b72f94de |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-0208 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0641 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J4-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-12 |
filingDate |
1998-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51a34e39557d130cddf4f65d8af2729f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f82d45cff0a38907cc0d5578c7106e7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6b00326826fb9add6c8c3e95f3a6ddf |
publicationDate |
1999-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-9930119-A1 |
titleOfInvention |
Reflectance spectrophotometric apparatus with toroidal mirrors |
abstract |
An apparatus uses reflectance spectrophotometry to characterize a sample (16) having any number of thin films. The apparatus uses two toroidal mirrors (33, 34) in an optical relay to direct light reflected by the sample (16) to a spectrophotometer (26). A computer then analyzes the reflected spectrum to characterize the optical properties of the sample (16). The optical relay allows a range of angles of reflection from the sample (16), and has no chromatic aberration. The optical relay is also arranged so that the non-chromatic aberration is minimized. The sample (16) is mounted on a movable stage (14) so that different areas of the sample (16) may be characterized. Furthermore, a deflector (24) and a viewer (28) are used to allow the operator of the apparatus to view the region of the sample (16) under study. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10310602-A1 |
priorityDate |
1997-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |