| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3d9d85d3af8745fad71dd844d6c4593
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_df0fd88222ce5b24d5c8122000a63acf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51ea83920fa687e50007860670ffd5ef |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-805
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-60 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-40 |
| filingDate |
1998-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1677f78f904b1927c6fa7abf984161a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f23d852350e7fb5e10792ebb30b3ba0 |
| publicationDate |
1999-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-9928521-A1 |
| titleOfInvention |
Sputter deposition |
| abstract |
A method of sputter deposition onto an organic material, wherein the discharge gas of the sputtering operation is a gas having a spectrum of light emission of a lower energy than that of argon. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7022894-B2 |
| priorityDate |
1997-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |