http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9921207-A1
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5deb38f073f39fc40e2924de41d980fd http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0d773425da00d46901156afe46e7b828 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0893542877e1b17406502dbe7b81e299 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-025 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02 |
filingDate | 1998-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41c47b104d4f236b4a8ef553e683ef05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94a9f07198dc08930a55d609a6c0f06e |
publicationDate | 1999-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | WO-9921207-A1 |
titleOfInvention | Field emission devices |
abstract | A field electron emission cathode is manufactured by depositing on an insulating substrate (300), by low resolution means, a sequence of a first conducting layer (301), a field emitting layer (302) and a second conducting layer (303) to form at least one cathode electrode. There is then deposited on the cathode electrode by low resolution means, a sequence of an insulating layer (304) and a third conducting layer (305), to form at least one gate electrode. The structure thus formed is then coated with a photoresist layer (306). The photoresist layer (306) is then exposed by high resolution means to form at least one group of emitting cells, the or each such group being located in an area of overlap between a cathode electrode and gate electrode. To complete the cells, the conducting and insulating layers (305, 304, 303) are etched sequentially to expose the field emitting layer (302) in the cells, and remaining areas of the photoresist layer (306) are removed. Thus, field emitting materials and devices can be manufactured using relatively low cost techniques. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1035559-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1035559-A2 |
priorityDate | 1997-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.