| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_95421ca98cd6c9b088dbf03ec09375ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4583
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
1998-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f096d9f594fe33cf8cf97ff82f051a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa69f4d6e6b68562a3f5f19799a7a899 |
| publicationDate |
1998-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-9839495-A1 |
| titleOfInvention |
Multipurpose processing chamber for chemical vapor deposition processes |
| abstract |
A processing station (201) adaptable to standard cluster tools has a vertically translatable pedestal (215) having an upper portion (217) including a heater plate (303) adapted to be plugged into a unique feedthrough (301) in the pedestal (215). At a lower pedestal position, wafers (219) may be transferred to and from the processing station (201), and at an upper position, the pedestal (215) forms an annular pumping passage (255) with a lower circular opening in a processing chamber (204). A replaceable ring (253) at the processing chamber opening allows process pumping speed to be tailored for different processes by replacing the ring (253). The pedestal (215) can also have a surrounding shroud (257) defining an annular pumping passage around the pedestal (215). A unique two zone heater plate (303) is adapted to the top of the pedestal (215), and connects to the feedthrough (301) allowing heater plates (303) to be easily replaced. Optionally, the top of the processing chamber is removable to allow for removal of pedestals (215) and/or heater assemblies. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1156135-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1159465-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007027791-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1159465-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1156135-A3 |
| priorityDate |
1997-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |