| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_087bed7abab91ae0f927879f9fe8b273 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-24137 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0077
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 |
| filingDate |
1998-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0803b5fe5b34506642388833dc4ff408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42c3872dd533db9166ba49d4a6faf194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91d90a648c7d35850b3962ca0db37367 |
| publicationDate |
1998-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-9832595-A1 |
| titleOfInvention |
Flexible skin incorporating mems technology |
| abstract |
A flexible skin formed of silicon islands (222) encapsulated in a polyimide film (214, 224). The silicon islands (222) preferably include a MEMS device and are connected together by a polyimide film (214, 222) (preferably about 1-100 νm thick). To create the silicon islands (222), silicon wafers (202) are etched to a desirable thickness (preferably about 10-500 νm) by Si wet etching and then patterned from the back side (200) by reactive ion etching (RIE). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105849890-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015071051-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109437094-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1046917-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10736607-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7049165-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109437094-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7067344-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7393714-B2 |
| priorityDate |
1997-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |