| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8bd01da5ca787e4718a160928172fbd5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0b5bdaf8096d203d42899b5ca590b2c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c7ad58d3c0b071069a8ee0cb8c8ba2e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c932d63f156a476489195121a119f29b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5a75b7a5b24a13e78bd0bd52526c47fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5134783b72cf9caad36af947674cf31e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_12e2001b53ad41dc4874acb792cde35c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02T50-60 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-16 |
| filingDate |
1997-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79a8c89f90816661d4fdfd2e052288f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_171e9242eb215fc6ab4a9f8f0ac6fe25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d79b66c0ecbd7e9733b7e7951d7f28a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27f5ae7163d3e3ca7de22c18284967ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc9b4565894cbd76ad3263278ca3ff2f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fdb92cd73a4b15244791100bbec323d6 |
| publicationDate |
1998-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-9810118-A1 |
| titleOfInvention |
Process for coating substrates with a silicium-containing protective layer by chemical vapour deposition |
| abstract |
A process is disclosed for coating substrates by chemical vapour deposition (CVD) with a silicium-containing protective layer. As starting compound a compound having structural formula (1) is used, in which R1 is an alkyl group with 1 to 4 carbon atoms; and R2 is hydrogen or an alkyl group with 1 to 4 carbon atoms. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7297649-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0222522-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8242298-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7795461-B2 |
| priorityDate |
1996-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |