| abstract |
The invention concerns new kinds of baths for producing microstructures, which are necessary in the most varied areas of application of microsystem technique and microstructuring. The invention aims to supply new kinds of baths for producing microstructures which provide a more economical and, most of all, a cleaner solution to the disposal problem than have all previously known methods for producing microstructures. This aim is achieved in that at least one biogenic catalyst (in particular, an enzyme) is added to the particular baths which act upon a predetermined thin film. |