| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6011815a3a9a97a05e427ccdfce929d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_db8acd71f5994544bda6df3f27a3f51e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f1d69798e9c1ff84021cc19cea89acd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_05b9f70b5db13de68f9be6cb06bcdbc1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B1-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B1-00 |
| filingDate |
1997-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1658596ff42db49b03eebec5e01d7561
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bdb1de80576ee6e5c974f752460176f7 |
| publicationDate |
1998-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-9803695-A1 |
| titleOfInvention |
Capped porous thin films |
| abstract |
A method of making vapor deposited thin films by rotating a substrate in the presence of an obliquely incident vapor flux. The substrate may be rotated about an axis normal to the surface of the substrate and/or parallel to the surface of the substrate by two motors mounted with their axes orthogonal to each other. A cap is formed on the thin film, for example by increasing the diffusion length of the material being deposited or by rotating the substrate about a plane parallel to the substrate (equivalent to changing the angle of incidence of the vapor flux). Feedback from a deposition rate monitor allows control of rotation speed of both motors to produce a growth with a defined pattern. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6998134-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10646622-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2945189-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8647654-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0225356-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0225356-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2384059-A |
| priorityDate |
1996-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |