http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9742792-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_69159fbb028e44be0a78cb3e4984dfd9 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49082 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-143 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-148 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-283 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-14 |
| filingDate | 1997-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da4c342e02370e1ddc6951a732abbe07 |
| publicationDate | 1997-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-9742792-A1 |
| titleOfInvention | Electric heating element and electrostatic chuck using the same |
| abstract | In order to eliminate the drawback of an electric heating element formed on an insulating ceramic substrate so that the element is brittle and becomes soft at a high temperature, an electrically heat-generating material having a microstructure composed of a silicide alone, a mixture of a silicide and Si, or Si alone is fused to the surface of a nitride or carbide ceramic insulating substrate. In order to provide an electrostatic chuck by which the temperature of an electrostatically chucked object to be treated, such as a semiconductor substrate, is quickly and precisely controlled, a heating mechanism is coupled with the bottom face of an electrostatically chucking mechanism provided with a dielectric ceramic and electrodes formed on the bottom face of the ceramic, and a cooling mechanism is coupled with the bottom face of the heating mechanism. The heating mechanism has a fusable electric-heating material film between two ceramic insulating substrates having the same or nearly the same coefficients of thermal expansion. The film is fused to the substrates. |
| priorityDate | 1996-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.