| abstract |
A coating fluid for low-permittivity silica coating which can form an insulating film having a low relative permittivity of 3 or less and is excellent in the adhesion to a surface to be coated, mechanical strengths, chemical resistances such as alkali resistance, and a cracking resistance, and can remarkably level irregularities of the surface to be coated; and a substrate having a low-permittivity silica coating formed thereon. The coating fluid contains fine particles of silica, an alkoxysilane represented by the following general formula and/or a silane halide represented by the following general formula and/or a silane halide represented by the following general formula or a product of a reaction with a hydrolyzate thereof: XnSi(OR)4-n or XnSiX'4-n (wherein X represents H, F, 1-8 C alkyl, aryl, or vinyl; R represents H, 1-8 C alkyl, aryl, or vinyl; X' represents a halogen atom; and n is an integer of 0 to 3). |