| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d45d8247d5a549f38ad2053a24226b19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0a6a69da5879eb83f56f6876dba3e3cf |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3205 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
1996-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06898c7f1706db787dea4e4251594ffe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ca2938b02208fc24c349e0830c9dd6a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8163272e481aa64b5d7ac490ef07bc7 |
| publicationDate |
1996-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-9634407-A1 |
| titleOfInvention |
Bottom electrode structure for dielectric capacitors and method of making the same |
| abstract |
An integrated circuit capacitor (20) includes a bottom electrode structure (24) having an adhesion metal portion (34), a noble metal portion (36), and a second noble metal layer (40). A process of manufacture includes annealing the adhesion metal portion (34) and the noble metal portion (36) prior to the deposition of second noble metal layer (40) for purposes of forming barrier region (38). The electrode (24) preferably contacts metal oxide layer (26), which is made of a perovskite or perovskite-like layered superlattice material. A temporary capping layer (59) is formed and removed in manufacture, which serves to increase polarization potential from the device by at least 40 %. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6379977-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2342227-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2342227-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005311385-A |
| priorityDate |
1995-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |