| abstract |
A microstructure (10) that may be used as an acoustic source or receiver. It comprises a substrate (13) having a thicker section (17) and a thinner section (16) supporting a membrane (15). A window (18) is formed in the thinner section (16). Means (12, 14) are provided for inputting or sensing mechanical energy in the substrate (13) and membrane (15). The microstructure (10) allows for the design of complex mechanical frequency responses for at least partly mechanical signal processing. |