| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_61dc49e21f24dc8a9aa11227e60eef65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9eb3b3c5adc5ab270ffac82c04376707
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6d7f7d5e24126380fe8cf82f38cb1964
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ea7cde5a991d8386a0fd57c73fe2643b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c56e287daa6aac615595ae6eaa954d9e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-346
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-00 |
| filingDate |
1994-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5977ede68d3472130123456cfb7e18d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8938b30bee84aa1b42fbb04c94be307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f214e284f4568c31375d26660b470423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbe69ba3a367c8712d321d84c6d5ccdf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8159f1aa45eedcb0609f1309c43b55c3 |
| publicationDate |
1994-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-9419832-A1 |
| titleOfInvention |
Plasma generating process and arrangement |
| abstract |
A plasma is generated by applying a voltage on mutually spaced apart spots of a microporous body. This may be done for example by applying a 50 to 100 V voltage through a microporous layer of a silicium wafer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6879103-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6005349-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6900592-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6147452-A |
| priorityDate |
1993-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |