| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_01e48e78fadaaec045333f9ad5a6e0b5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G75-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-3872
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G83-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J3-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G75-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G83-00 |
| filingDate |
1993-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f79bc2d5348a06a4a504140a5f80cfb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f9ff0cb054ce855e2e71c6fbed192ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_777514f9760b6892a5456e02ea3b2351
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21fdb0399a0d7d344cf129e5e8e306bd |
| publicationDate |
1994-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-9419396-A1 |
| titleOfInvention |
Polymers with intrinsic light-absorbing properties |
| abstract |
A composition and a method for forming an anti-reflective layer for DUV microlithographic processes is disclosed. The compositions of the present invention includes a polymer dissolved in a suitable solvent. The polymers are polysulfone and polyurea polymers which possess inherent light absorbing properties at deep ultraviolet wavelengths. In accordance with the method of the present invention, these compositions are applied to a substrate to form an anti-reflective coating, and thereafter a photoresist material that is compatible with the anti-reflective coating is applied. |
| priorityDate |
1992-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |