| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80325b68f9e34b5b385c55515aaca51d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c569ddf3634e2b9544607e88df036a4f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_59a28768b3e37fc10c4fb7dcbc44d899 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0042 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L13-06 |
| filingDate |
1993-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b30707f484658e7f50c399e018093b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a89cc65e1ef9a8819e7199abe1adca7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a501c6ac413d71364ada730bb2886957 |
| publicationDate |
1994-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-9417383-A1 |
| titleOfInvention |
Pressure sensor |
| abstract |
A pressure sensor has a substrate (21) and a layer (25) which defines together with the substrate a pressure sensor cavity (24). The layer has a diaphragm-like area (26) upon which an outer pressure may be applied. In order to create a microminiaturized pressure sensor of the above-mentioned type for differential or relative pressure measurements, a channel (27) which extends along the surface of the substrate is connected to the cavity. The channel has a layered structure which also includes the layer which defines the diaphragm-like area of the pressure sensor. The relation between the width of the channel and the thickness of the layered structure (25, 30) above the channel is smaller than the relation between the smallest dimension of the diaphragm-like area in the plane of the diaphragm and the thickness of the diaphragm-like area. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1207378-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1207378-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7273763-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0811831-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6892582-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9700433-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6631645-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5969591-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19839606-C1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19740244-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112011104033-B4 |
| priorityDate |
1993-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |