Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1ba1e3cb7eb324719044ad3e924821fc http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2aea911a292375f04092023a894cd417 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_199cc1592a5a406e109d160fa561ee3e http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2936c942e4d4939a8b8c5bd83b41ed7f |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-1256 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-945 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-4738 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-5911 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-93 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-4709 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-3133 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-474 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8427 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-6456 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-59 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-12 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F02K9-96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-93 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-64 |
filingDate |
1993-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8fb14a75177f2c9a12ac4445385a054 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07c16e822e9e97738335db521442e981 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_651a79281e5399378e125238fbc18f6c |
publicationDate |
1993-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-9322655-A1 |
titleOfInvention |
Acousto-optic tunable filter-based surface scanning system and process |
abstract |
A scanning system (10) for inspecting a surface (16) including a light source (30) which generates a beam of light (32) that is reflected, scattered or causes fluorescence at the surface to be inspected. An optical interface (14) receives the beam of light and directs it along a predetermined path extending to and from the surface. An acousto-optic tunable filter (34) tuned to pass light having a wavelength corresponding to a known optical property of a predetermined material is positioned within the path of light. A detector (42) is positioned to receive light emanating from the surface and is configured to monitor the intensity of light at each predetermined wavelength being monitored and generate a corrsponding signal. The system is preferably attached to a scan board (90) thereby enabling the system to be used in scanning a surface. The system also includes a signal processor (22) which processes the signal generated by the detector. The resulting data is displayed by an output device (26). |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9915881-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110596045-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1265058-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110402178-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0841557-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018114719-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1265058-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008138976-A1 |
priorityDate |
1992-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |