abstract |
Green sheet having a carrier film made of a polymer film which has a glass transition point of 90 °C or higher, and a thermal expansion coefficient of 6.0X10-5cm/cm °C or less, and has a high organic solvent durability and a high humidity durability, and production of a multilayer printed circuit substrate using the same. Damages during the step of producing green sheets for ceramics multilayer substrate can be decreased and the step of producing the multilayer substrate can be simplified. |