| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S75-95 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-58092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-58085 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate |
1991-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ce53d13ab7680be07bb0607d41136e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a2fe0d30709be581609005491e13c4e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ff98f419679de7e859eb03c6a52dfc3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53979e2af50cb5771fe1070c980f756a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b64da6653aa3c0b96ec9d713b3eb35d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89b669c03a2d4b581d00ba4dfafc6cfb |
| publicationDate |
1991-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-9118125-A1 |
| titleOfInvention |
Sputtering target and production thereof |
| abstract |
A sputtering target having a high-density fine mixed texture wherein metallic silicide molecules are linked in a chain to form a metallic silicide phase and noncontinuous silicon phases are present in the interstices of the metallic silicide phase and containing 100 ppm or less of carbon. Since the target has a high density and a high strength, the amount of particles generated in sputtering is reduced. Since the carbon content is reduced so as to prevent the carbon from being mixed into the formed film, it is possible to produce semiconductor products with a high quality and a high accuracy. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0735159-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5464520-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5418071-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7241368-B2 |
| priorityDate |
1990-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |