http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9105028-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_57827944df5ffb8a405727e03086fd96 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02581 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02557 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B31-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-365 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K11-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B31-08 |
| filingDate | 1990-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f485ad0edbb5e99468c0b0c7e1bcfc6b |
| publicationDate | 1991-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-9105028-A1 |
| titleOfInvention | Doping method |
| abstract | The object of the invention is a method for doping manganese evenly into a zinc sulfide thin film. In the method a manganese compound suitable for the formation of manganese sulfide and of the formula MnX2?, wherein X has the meaning of chlorine or bromine or other suitable atom or group, is fed into a doping chamber, whereby simultaneously with the manganese compound MnX2?, a zinc compound reacting with manganese sulfide is fed into the doping chamber, the zinc compound having the formula ZnX2?, wherein X has the meaning given above, using such a mutual ratio of partial pressures of ZnX2? and MnX2? as is necessary for obtaining the desired manganese concentration in the thin film, at least until the zinc sulfide - manganese sulfide throughout mixture in the doping chamber has reached equilibrium with the gas mixture in the doping chamber corresponding to the fed gas mixture. |
| priorityDate | 1989-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.