| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c8e6a13e4ae501eb40decf5732cf09c6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate |
1985-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32fcbf4e38666d0b08fbbd8f31146b91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_205133d85ff714f461b8124b28c7f61e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_737ca605b8840d4b33a8195044e7f38d |
| publicationDate |
1986-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-8601616-A1 |
| titleOfInvention |
Fabrication of devices involving lithographic procedures |
| abstract |
Process for fabrication of devices utilizing novel extremely useful compositions for delineation of materials. These compositions include a polymer having segments that are at least (10) monomer units long of a first entity and segments again at least (10) monomer units long of a second entity. The monomer units are chosen so that each segment type provides a specific chemical characteristic to the polymer. |
| priorityDate |
1984-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |