http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023277450-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_49ef77ddcdf0c2dd1476e6872114c018 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2022-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ccfaf21809ee83b7f73afcb79388dc08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7cb70250cabd86e10ff7a13fdabaf97e |
| publicationDate | 2023-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2023277450-A1 |
| titleOfInvention | Semiconductor manufacturing device |
| abstract | A semiconductor manufacturing device according to the present embodiment comprises: an ultraviolet ray forming unit which is located in an ultraviolet ray forming chamber and forms ultraviolet rays of desired wavelengths by irradiating an intensive electron beam (e-beam) to form a linear plasma; a substrate driving unit which is located in a processing chamber in which a charged substrate is processed with the ultraviolet rays and comprises a chuck that supports the charged substrate, and an axis for rotating the chuck; and a window which is located between the ultraviolet ray forming unit and the processing chamber and allows the formed ultraviolet rays to pass through the processing chamber. |
| priorityDate | 2021-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.