http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022266449-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fb59d807825c02345739f5369d87845c |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate | 2022-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bce4ecdccc98d92affb8598ee7d263bf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_966768d6174960907273a3e1b9fe1987 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0df6e4ff4f5c6142aec58c472b92537 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2de24574af39618289c05897410a089d |
| publicationDate | 2022-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2022266449-A1 |
| titleOfInvention | Gallium precursors for deposition of gallium-containing oxide films |
| abstract | A method of deposition of a gallium-containing oxide film on a substrate comprises a) simultaneously or sequentially, exposing the substrate to a vapor of a gallium precursor, additional metal precursor(s) and an oxidizer; b) depositing at least part of the gallium precursor and at least part of the additional metal precursor(s) onto the substrate to form the gallium-containing oxide film on the substrate through a vapor deposition process, wherein the gallium precursor has the formula: (NR8R9)(NR1R2)Ga[(R3R4N)Cx(R5R6)(NR7)] (I) (Cy-N)2Ga[(R3R4N)Cx(R5R6)(NR7)] (II) wherein, R1 to R9 are independently selected from H, Me, Et, nPr, IPr, nBu, iBu, sBu, or tBu; R1 to R9 may be the same or different; x = 2, 3, 4, preferably x = 2; Cy-N refers to saturated N-containing rings or unsaturated N-containing rings. |
| priorityDate | 2021-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 90.