| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d6660167441edb2ac3d2d8445b278307 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2022-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d332bd4db3a9967feee7477fc489a79e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_289485a26351fc607fb304b9b163fdb5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49b13291076eef9855211e999b404f03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7858e2c21268c2bca8c57167a786b530
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0aa491c784afe4631497ea67cb5d1837 |
| publicationDate |
2022-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2022243280-A1 |
| titleOfInvention |
Liquid dispersion and powder of cerium based core-shell particles, process for producing the same and uses thereof in polishing |
| abstract |
The invention relates to cerium based core-shell particles having a core of cerium oxide optionally doped with at least one metal (M) and a shell consisting of a plurality of nanoparticles of cerium oxide optionally doped with at least one metal (M'), which can be the same or different from metal (M), formed on the surface of the core particle. The invention also relates to dispersions thereof in a liquid medium, to a process for producing the same and to the use of these particles and dispersions in polishing applications such as chemical mechanical polishing. |
| priorityDate |
2021-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |