| abstract |
A vanadium silicon carbide film coated member comprising a substrate, a nitride layer formed on a surface of the substrate, and a vanadium silicon carbide film formed on the nitride layer and having a surface roughness Rzjis of 0.2-1.0 μm, wherein the vanadium silicon carbide film contains vanadium, silicon, and carbon, and, in the film, the total of the vanadium element concentration, the silicon element concentration, and the carbon element concentration is 90 at% or more. |