| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7098017ee36d1bee7e75d86c6a8b839d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-201
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-778
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66848
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-812 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-812
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-201
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-338
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-778 |
| filingDate |
2022-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ade2d5e4c91f4769fd3d70d9d9e364b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ed32167481e344d5dbcc1c144084a93
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ae1cbd0b0d49e20bc02e6bba19f6510
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a8dec4e4e91db671ce6e9ad8c8a7c2c |
| publicationDate |
2022-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2022210401-A1 |
| titleOfInvention |
Laminated structure |
| abstract |
This laminated structure comprises a substrate and a gallium nitride film disposed on the substrate. The arithmetic mean roughness (Ra) of the substrate surface is less than 0.33 nm. Alternatively, the laminated structure comprises: a substrate; an alignment layer which is disposed on the substrate and which has a c-axis orientation or a (111) orientation of a face-centered cubic structure; and a gallium nitride film disposed on the alignment layer. The arithmetic mean roughness (Ra) of the substrate surface is less than 0.33 nm. Alternatively, the laminated structure comprises: a substrate; a protective layer disposed on the substrate; an alignment layer which is disposed on the protective layer and which has a c-axis orientation or a (111) orientation of a face-centered cubic structure; and a gallium nitride film disposed on the alignment layer. The arithmetic mean roughness (Ra) of the substrate surface is less than 0.33. |
| priorityDate |
2021-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |