http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022210241-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8205ec6ee1cd95eb60a03826535bad97 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J7-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B7-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B7-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2022-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a2f48d129df049a33887673347aee06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a1e52ebb547388b1fb39a53f807427f |
| publicationDate | 2022-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2022210241-A1 |
| titleOfInvention | Laminate, release agent composition, and method for manufacturing machined semiconductor substrate |
| abstract | This laminate includes a semiconductor substrate, a light-transmissive support substrate, and an adhesive layer and a release layer provided between the semiconductor substrate and the support substrate, wherein: light emitted from the support substrate side is absorbed by the release layer and then used to cause the semiconductor substrate and the support substrate to be peeled off; the release layer is a layer formed from a release agent composition; and the release agent component has a structure that absorbs the light and contains a compound having a first structure which contributes to the semiconductor substrate and the support substrate being easier to peel off by absorbing the light, and which has two or more aromatic rings constituting a π electron conjugated system, and having a siloxane structure serving as a second structure. |
| priorityDate | 2021-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 770.