| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D17-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D17-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2022-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d12f34d398ac20a632dc6bab77e7ec8a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_faa9fb6c5ed184635aa3ce761c23ea40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9cc9ccffa31b8a092f6edd7dcb7a989
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_900883b1a572644851a9c28af7f5e765 |
| publicationDate |
2022-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2022202287-A1 |
| titleOfInvention |
Semiconductor substrate cleaning solution, and method for cleaning semiconductor substrate |
| abstract |
The present invention addresses the problem of providing a semiconductor substrate cleaning solution and a method for cleaning a semiconductor substrate, which exhibit excellent cleaning performance with respect to organic impurities. A semiconductor substrate cleaning solution according to the present invention is used to clean a semiconductor substrate, and comprises a compound represented by formula (A). |
| priorityDate |
2021-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |