http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022201831-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01M3-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01M3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2022-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8abe19c7902c5edf9c73c775d853498d |
| publicationDate | 2022-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2022201831-A1 |
| titleOfInvention | Exhaust control method for processing liquid cabinet and substrate processing device |
| abstract | This exhaust control method for a processing liquid cabinet (120) comprises a standard exhaust step for discharging atmosphere from within the processing liquid cabinet (120) under a standard exhaust condition, a liquid leakage detection step for detecting liquid leakage that has occurred within the processing liquid cabinet (120), a liquid leakage state assessment step for using the result of the detection in the liquid leakage detection step to assess the liquid leakage state within the processing liquid cabinet (120), a forced exhaust condition determination step for using the result of the assessment in the liquid leakage state assessment step to determine a forced exhaust condition set so as to produce an exhaust amount larger than the exhaust amount produced by the standard exhaust condition, and a forced exhaust step for discharging atmosphere from within the processing liquid cabinet (120) under the forced exhaust condition determined in the forced exhaust condition determination step. |
| priorityDate | 2021-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.