| abstract |
Provided is a laminate characterized by comprising a semiconductor substrate, a support substrate that transmits ultraviolet rays, and an adhesive layer and a release layer that are provided between the semiconductor substrate and the support substrate, the laminate moreover being characterized in that the release layer is a film obtained from a release agent composition containing a photoacid generator, a solvent, and a polymer of ethylenic unsaturated monomers including tertiary butoxycarbonyl groups. |