abstract |
A method for determining a material property of a solid substrate, such as an atomic composition of a functional thin film, the method comprising: -providing an array of plasmonic nanostructures on at least one portion of the substrate, -illuminating the at least one portion of the substrate on which the array of plasmonic nanostructures is arranged, -determining an optical extinction and/or reflectance peak of the illuminated array of plasmonic nanostructures provided on the substrate, -based on the determined optical extinction and/or reflectance peak, determining the material property of the at least one portion of the substrate. |