abstract |
An embodiment relates to a ceramic component and a method for manufacturing a ceramic component, and provides a ceramic component containing boron carbide, wherein residual stresses measured on the surfaces of two points having different distances from the center thereof are S1 and S2, respectively, and the difference between S1 and S2 is -600 to +600 MP. According to an embodiment, a ceramic component used in equipment for manufacturing a semiconductor element can be efficiently manufactured while being improved in quality. |