http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021162422-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_854de7644e0cfd570d92d85b1bf6e614
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3821
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-9669
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6567
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-661
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-63476
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28B11-243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-626
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-563
filingDate 2021-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e09032d60b0c8cf8de8e5f51105342c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c8380e5b092e8803f99b1b6501b2bfc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86b77032fdce7780be91acd79a85b32d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd6e831c90b85909c17e63278f17a243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1d87d46511843a7d242644ed7735c66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63463e218169599fd869ddd6fdd44617
publicationDate 2021-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2021162422-A1
titleOfInvention Ceramic component and method for manufacturing ceramic component
abstract An embodiment relates to a ceramic component and a method for manufacturing a ceramic component, and provides a ceramic component containing boron carbide, wherein residual stresses measured on the surfaces of two points having different distances from the center thereof are S1 and S2, respectively, and the difference between S1 and S2 is -600 to +600 MP. According to an embodiment, a ceramic component used in equipment for manufacturing a semiconductor element can be efficiently manufactured while being improved in quality.
priorityDate 2020-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19980063542-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20060106865-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1121163-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180093814-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101628689-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110018997-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549336
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123279

Total number of triples: 51.