http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021153112-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-00 |
| filingDate | 2020-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a0c6ec95f8e4a9cbf1b640cae4f84cb |
| publicationDate | 2021-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2021153112-A1 |
| titleOfInvention | Method for manufacturing metal-filled microstructure |
| abstract | Provided is a method for manufacturing a metal-filled microstructure in which metal filling defects in a plurality of pores are suppressed when the metal is filled in the plurality of pores. The method for manufacturing a metal-filled microstructure comprises: a step of providing an insulating film having a plurality of pores on the surface of a metal member to obtain a structure having the metal member and the insulating film, and a plating step of performing metal plating on the surface of the structure at least on the side having the insulating film in a supercritical state or a subcritical state and filling the plurality of pores with a metal. At the start of the plating step, a metal layer other than a valve metal is present at the bottom of the pores of the structure, and the metal layer other than the valve metal is formed on a region of 80% or more of the area of the bottom of the pores. |
| priorityDate | 2020-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 104.