http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021149432-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F12-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-58 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-58 |
| filingDate | 2020-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_381de81b1f3fad7df1c4007aacaa45f8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d32c286d5b6f2f328c18f930e3e1c044 |
| publicationDate | 2021-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2021149432-A1 |
| titleOfInvention | Method for forming pattern, radiation-sensitive composition, and clathrate compound |
| abstract | Provided are: a method for forming a pattern using a novel pattern-forming material; a radiation-sensitive composition usable as the novel pattern-forming material; and a clathrate compound suitable for use as a component of such radiation-sensitive composition. An aspect of the present invention is a method for forming a pattern which comprises a step in which a radiation-sensitive composition comprising both a polymer having a host group and a first guest compound is used to form a coating film on a substrate, a step in which the coating film is exposed to light, and a step in which the exposed coating film is developed, wherein the host group is a monovalent group formed by removing one hydrogen atom or hydroxyl group from a cyclodextrin derivative. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023171709-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022049911-A1 |
| priorityDate | 2020-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 395.