| abstract |
The invention relates to a method for producing a piezoelectric multilayer sensor and/or actuator, in which the electrically conductive layers (10), optionally with the exception of the lowest electrically conductive layer, and the piezoelectric layers (8) are formed from functional ceramics, in that in each case a precursor solution (1, 2) for the functional ceramic is applied to a substrate (4) or a layer or succession of layers already formed on the substrate (4) and the functional ceramic is then formed from the precursor by thermal processing. The precursor solution (1, 2) is applied in each case using additive manufacturing technology and the thermal processing takes place by laser treatment. The method can be carried out cost-effectively and avoids elaborate vacuum or mask processes and thermal damage. |