http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021093796-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4fee86b701ac6ff8d7f059fd27feb184 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L19-0618 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0018 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-08 |
| filingDate | 2020-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e28a14b6e32785422acf225c0907efc3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40481eaffd89866412a46ed919002287 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf9f232491e42ed858b6b7ec78af64ce http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_051ace3e41240ed44e3e5d5f0bef42d9 |
| publicationDate | 2021-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2021093796-A1 |
| titleOfInvention | Piezoelectric mems acoustic sensor |
| abstract | Provided is a piezoelectric MEMS acoustic sensor, comprising a substrate (1), an inner electrode area (13), and an outer electrode area (12); the outer electrode area (12) is located at the periphery of the inner electrode area (13), and each of the inner electrode area (13) and the outer electrode area (12) comprises a top electrode (9, 6), an upper piezoelectric layer (4), a middle electrode (10, 7), a lower piezoelectric layer (3), and bottom electrode (11, 8); the top electrode (9), middle electrode (10), and bottom electrode (11) in the inner electrode area (13) and the top electrode (6), middle electrode (7), and bottom electrode (8) in the outer electrode area (12) are separated from each other; a lower support layer (2) is provided on the top of the substrate (1), the inner electrode area (13) and the outer electrode area (12) are located on the lower support layer (2), and an upper support layer (5) made of silicon-based material is provided on the top surfaces of the inner electrode area (13) and the outer electrode area (12). The piezoelectric MEMS acoustic sensor has high sensitivity, strong resistance to hydrostatic pressure, and satisfies application requirements of different pressure resistance and operating water depth. |
| priorityDate | 2019-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.