| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9305fc720f87097494d965f1b1310e24 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate |
2020-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5550b7bd9cb6c6053fd6bdadf4863bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f88e023e2ab270ae03d59fa57f3e309a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2b580eac2b86ec08a7f88e4fd1c2900
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_680a6cab2b719a88c7b8c71d4a9c4b7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77ed1a6547f0d357d6bff04ac7612652
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50c5226eb275f6131cfc654c26a6e2ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85bf0ba815c9f78898d885a93bbfee72 |
| publicationDate |
2021-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2021085810-A2 |
| titleOfInvention |
Group 4 transition metal compound, preparation method therefor, and composition, comprising same, for depositing thin film |
| abstract |
The present invention relates to a Group 4 transition metal compound, a preparation method therefor, and a method for forming a thin film by using same. The Group 4 transition metal compound according to the present invention shows excellent volatility and is thermally stable, and can be used as a precursor to prepare a high-density and high-purity Group 4 transition metal-containing thin film. |
| priorityDate |
2019-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |